Vacuum pump
US4929151A · kind A · utility
19Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 1989 |
| Grant date | May 29, 1990 |
| Priority date | — |
| Expiry date | Jun 21, 2009 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05D2260/607
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A molecular or turbomolecular type of pump comprising a stator (2) and a rotor (3) rotated by a motor (7), the stator having a first zone overlying the rotor and in which gas is admitted, and a second zone adjacent to the drive motor and cooled by a flow of fluid (8), the pump being characterized in that the first zone is provided with heater (12) for maintaining the temperature of the first zone above the condensation threshold of the gas being admitted, with the first and second zones being separated from each other by a thermal impedance element (13).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.