Positive-working photosensitive mixture and photolithographic copying material produced therefrom with o-quinone dialide sulfonyl ester and azo coupler

US4929534A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Trutz-Ulrich Stephani · Erding, DE
• Dieter Mohr · Appenheim, DE
• Britta Maisel · Bischofsheim, DE
• Werner Frass · Wiesbaden, DE

Key dates

• Filing date: Aug 26, 1988
• Grant date: May 29, 1990
• Expiry date: Aug 26, 2008

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0226
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A positive-working photosensitive mixture containing an o-quinone diazide and a binder is disclosed wherein the mixture contains a compound which is able to form an azo coupling with the o-quinone diazide. A copying material produced with the photosensitive mixture has a high photosensitivity and an exceptional developer resistance. The photosensitive mixture is used in reproduction technique, and also in the field of resists.