Patent · US Expired

Nonvolatile semiconductor memory device with a double gate structure

US4930105A · kind A · utility

12Cited by
9References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 7, 1988
Grant dateMay 29, 1990
Priority date
Expiry dateApr 7, 2008

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG11C16/0425
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A memory cell of a nonvolatile semiconductor memory device includes a P conductive type semiconductor substrate, first and second diffusion layers of an N conductivity type, formed in the substrate, a channel region formed in the surface region of the substrate, and which is located between the first and second diffusion layers, a floating gate electrode formed on the channel region, and a control gate electrode formed on the floating gate electrode. The memory cell further includes a third diffusion layer of the N conductivity type, and formed between the first layer and the channel region, the third layer having an impurity concentration lower than that of the first layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.