Process for producing mutually spaced conductor elements on a substrate
US4931137A · kind A · utility
12Cited by
5References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 17, 1987 |
| Grant date | Jun 5, 1990 |
| Priority date | — |
| Expiry date | Nov 17, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/951
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The invention relates to a process for producing on a substrate conductor elements which are mutually spaced by a submicron dimension. This process comprises the stages of producing on substrate (1) spacers, whose dimensions and spacing are a function of the dimensions and spacing of the elements (11a) to be produced, anisotropic deposition on the substrate and perpendicular thereto of the material (11a) constituting the spacers and elimination of said spacers. The invention applies to the production of any random elements and particularly to the production of slightly mutually spaced electric conductors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.