Apparatus for testing semiconductor device
US4931726A · kind A · utility
57Cited by
7References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 1988 |
| Grant date | Jun 5, 1990 |
| Priority date | — |
| Expiry date | Jun 21, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device testing apparatus which has a plurality of probes and plurality of coaxial cables connected therewith for impedance matching and a plurality of springs for providing flexibility to the individual probes to absorb a level difference in the surface of a semiconductor device. The apparatus constructed in this manner allows for an effective test of a semiconductor device with a high density electrode arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.