Gas sensitive device
US4931851A · kind A · utility
49Cited by
7References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 1987 |
| Grant date | Jun 5, 1990 |
| Priority date | — |
| Expiry date | Mar 12, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/49107
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas sensitive device, for example a gas sensitive MISFET (FIGS. 1 to 3) has a gas-sensitive electrode (15) comprising a catalytically active metal (e.g. Pt or Pd) and a non-metallic material (e.g. SiO.sub.2) mixed with, or deposited at an exposed surface of, the metal to modify the catalytic activity of the metal. The electrode has an enhanced sensitivity to, and selectivity of, certain gases. The composite material is applicable to other gas-sensitive devices, e.g. an optical fibre gas sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.