Laser and thermal assisted chemical vapor deposition of mercury containing compounds
US4933207A · kind A · utility
3Cited by
12References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 1989 |
| Grant date | Jun 12, 1990 |
| Priority date | — |
| Expiry date | Jun 30, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/48
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mercury compound such as mercury telluride or mercury cadmium telluride is deposited upon a substrate by chemical vapor deposition, with dissociation of the organic compounds accelerated by laser energy. The mercury-containing compound is preferably divinylmercury, which dissociates under intense light of 248 nanometers wavelength to deposit mercury in combination with the codeposited element. The laser-assisted chemical vapor deposition is accomplished at 100.degree. C. to 195.degree. C., preferably 165.degree. C., without the deposition of carbon contaminants.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.