Self aligning air bearing platform
US4934671A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 27, 1989 |
| Grant date | Jun 19, 1990 |
| Priority date | — |
| Expiry date | Apr 27, 2009 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23Q1/5443
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Two partial cylindrical, externally pressurized static air bearings are used to provide a self aligning air bearing platform. The self aligning air bearing platform is useful in a tape automated bonding system to bond a semiconductor device having a high pin count. A bottom bearing block has a top surface in the shape of an arc and at least one air outlet. A middle bearing block has a bottom surface configured to mate with the top surface of the bottom bearing block. The middle bearing block also has a top surface in a shape of an arc which is rotated 90.degree. with respect to the arc shaped top surface of the bottom bearing block and at least one air outlet. A top bearing block mates with the middle bearing block and provides the platform for holding the semiconductor device. Air bearings between the moving bearing blocks provide a low friction bearing for the aligning platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.