Novel diamond-like carbon film and process for the production thereof
US4935303A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 14, 1988 |
| Grant date | Jun 19, 1990 |
| Priority date | — |
| Expiry date | Oct 14, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A general-purpose novel diamond-like carbon film (DLC film) and its manufacture, and the DLC film is characterized by the following items (i) to (iv); (i) the film structure contains mainly diamond crystalline phases, and has a hydrogen content of 20 atomic %, the presence of diamond crystalline phases is confirmed by analysis by the electron diffraction method, and the diffraction peak appears at 2.theta.=43.9 by analysis by the X-ray diffraction method; (ii) the density is 1.8 g/cm.sup.3 or over; (iii) the film surface is smooth and excellent in etching resistance; and (iv) the film is chemically stable and structurally stable, and these stabilities are not deteriorated under high temperature conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.