Electron holography apparatus
US4935625A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 30, 1988 |
| Grant date | Jun 19, 1990 |
| Priority date | — |
| Expiry date | Aug 30, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2614
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron holography apparatus includes an electron microscope which is provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams, and further includes an image detector for detecting an electron interference fringe pattern which varies in accordance with the phase difference between the first and second electron beams, as a picture image, and an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.