Gas sensor
US4938928A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 30, 1989 |
| Grant date | Jul 3, 1990 |
| Priority date | — |
| Expiry date | Jan 30, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor comprising a metal heat generating member formed with a heat-resistant insulating coating of Al.sub.2 O.sub.3 or the like over its surface, and an atmosphere-sensitive layer of SnO.sub.2 or the like supported on the coating. The insulating coating is formed, for example, by alumina sol coating and thermal decomposition, or plasma CVD of an aluminum compound. The sensitive layer is formed, for example, by the thermal decomposition of an organic compound of tin, vacuum evaporation or sputtering of tin, or printing of SnO.sub.2 on the heat generating member when the member is in the form of a flat plate. At least one electrode is connected to the sensitive layer for deriving an output from the layer in response to a combustible gas, humidity or the like.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.