UV-curable organopolysiloxane compositions and negative photoresists comprised thereof
US4939065A · kind A · utility
12Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 11, 1988 |
| Grant date | Jul 3, 1990 |
| Priority date | — |
| Expiry date | Jul 11, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/118
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Substrates, e.g., silicon wafers, coated with a UV-curable organopolysiloxane composition including a crosslinking catalyst therefor (e.g., a platinum group metal compound) and an amount of a crosslinking inhibitor (e.g., an azodicarboxylate) which is effective at ambient temperature, but ineffective to prevent crosslinking on exposure of the composition to ultraviolet radiation, are well adapted for the imaging of negative intelligence patterns thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.