Pressure sensor
US4939497A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 1989 |
| Grant date | Jul 3, 1990 |
| Priority date | — |
| Expiry date | Apr 18, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48091
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The pressure sensor has a housing, a sensing body mounted inside an internal space of the housing and having a cavity, one end thereof being open and other end thereof being closed, to form a pressure introducing portion therein, the closed end thereof having a thin thickness forming a diaphragm for receiving a pressure, and a semiconductor chip mounted on one surface of the closed end opposite to the diaphragm for receiving a pressure. The pressure sensor is characterized in that the sensing body is attenuated at a portion including at least the closed end thereof and has a diameter smaller than that of the remaining portion thereof, and a shoulder is provided therebetween, whereby the sensing body is fixedly connected to the internal space of said housing by abutting the shoulder thereof against a stopper portion provided in the internal space of the housing and the external surface thereof is placed in contact with the inner surface of the internal space of the housing. The pressure sensor having the above construction is highly sensitive and can accurately measure a pressure of a high pressure fluid, as the sensing body is firmly fixed to the inner surface of the housing and ha…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.