Electrostatic dust collector for use in vacuum system
US4941224A · kind A · utility
34Cited by
2References
2Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jul 19, 1989 |
| Grant date | Jul 17, 1990 |
| Priority date | — |
| Expiry date | Jul 19, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/022
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electrostatic dust collector including a wall enclosing a vacuum chamber in which a target face to be subjected to dust removal is provided, an electron beam emitting device for emitting electron beams to dust on the target face so as to charge the dust negatively, a dielectric member which is provided in the vacuum chamber and has a collecting face confronting the target face and a member for imparting positive potential to the collecting face such that the dust charged negatively is attracted to the collecting face.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.