Flexible rocking mount with forward pivot for polishing pad
US4941293A · kind A · utility
Inventor
Key dates
| Filing date | Feb 7, 1989 |
| Grant date | Jul 17, 1990 |
| Priority date | — |
| Expiry date | Feb 7, 2009 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D5/10
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A flexible mounting for an abrasive planar pad onto a carrier rotated about a first axis of rotation. The carrier has a face side perpendicular to the axis of rotation and a resilient, frustroconical sleeve affixed to the face for rotation therewith. The tapering walls of the sleeve define opposed intersecting axes forming a virtual gimbal with the gimbal center or pivot point in close proximity to the planar surface of the pad. The forward position of the gimbal center and its proximity to the planar surface allows rocking of the pad to follow any misalignment of a planar article to be abraded, yet neutralizes those forces which urge pivoting of the abrasive pad relative to the planar article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.