Thin-film coating apparatus
US4941426A · kind A · utility
16Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 16, 1988 |
| Grant date | Jul 17, 1990 |
| Priority date | — |
| Expiry date | Sep 16, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/162
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thin-film coating apparatus rotates a member on which a coating solution is dropped to spread the coating solution over the member. The thin-film coating apparatus comprises a spinner for securely supporting the member, a casing firmly attached to the spinner in surrounding relation to the spinner and the member, and a lid for closing an opening in the casing through which the member can be brought into and out of the casing, thereby defining a closed processing chamber in the casing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.