Beam allocation and delivery system for excimer laser
US4941734A · kind A · utility
8Cited by
5References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1988 |
| Grant date | Jul 17, 1990 |
| Priority date | — |
| Expiry date | Nov 18, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/09
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is directed to a beam allocation and delivery system for an excimer laser in which substantially the full energy from such laser is delivered to a precise area or areas of a workpiece. This efficient system is achieved by the use of one or more elongated light-guides to direct the laser beam. Included therewith are means to shape and focus said beam to a reduced image on the workpiece. Preferably, the shaping and focussing is achieved by changing the cross-section of the light-guide from a first configuration to a second configuration, and by an imaging lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.