Making an amorphous layer

US4942057A · kind A · utility

Assignee

• Dornier System GmbH

Inventors

• Juergen Steinwandel · Überlingen, DE
• Manfred Hauser · Leonberg, DE
• Joerg Hoeschele · Stuttgart, DE

Key dates

• Filing date: Aug 14, 1987
• Grant date: Jul 17, 1990
• Expiry date: Aug 14, 2007

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/0262
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Amorphous layers are made by decomposing one or several gaseous compounds which include an element or elements to be deposited. These are group 3 and 5 or group 4 elements but amorphous layers of other metals can also be made. The compound is added in a small concentration to a hot gas, preferably hydrogen, helium or argon and a diffusor accelerates the mixture while molecular clusters of the element or elements are formed and impinge upon a target for depositing thereon.