Preparation of superconducting oxide films using a pre-oxygen nitrogen anneal
US4943558A · kind A · utility
12Cited by
1References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 15, 1988 |
| Grant date | Jul 24, 1990 |
| Priority date | — |
| Expiry date | Apr 15, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/742
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
This invention is directed to a method of preparing a superconducting metal oxide film on a substrate. More particularly, the method comprises depositing a superconducting metal oxide precursor film on the substrate and then subjecting it to annealing in an oxygen nitrogen atmosphere followed by annealing in an oxygen atmosphere, followed by rapid cooling, according to schedule wherein the time and temperature are critically defined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.