Apparatus for detecting and centering wafer
US4944650A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 28, 1988 |
| Grant date | Jul 31, 1990 |
| Priority date | — |
| Expiry date | Oct 28, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for detecting an orientation flat of a wafer and centering the wafer includes a hand base, a pair of guide rollers mounted on the hand base, and a stopper mechanism mounted on the hand base. The hand base is operable to be located in opposed relation to one of opposite faces of the wafer, and has an axis therealong. The guide rollers serve to support the wafer located in opposed relation to the hand base, and are symmetrically disposed with respect to the axis of the hand base. The stopper mechanism cooperates with the pair of guide rollers to center the wafer, and are movable along the axis of the hand base and engageable with the orientation flat of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.