Alloy target for magneto-optical recording
US4946501A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 1989 |
| Grant date | Aug 7, 1990 |
| Priority date | — |
| Expiry date | Oct 16, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B11/10586
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An alloy target for magneto-optical recording having component and composition comprising 10 to 50 atom % of at least one rare earth element from Sm, Nd, Gd, Tb, Dy, Ho, Tm and Er, the balance being substantially at least one transition metal from Co, Fe and Ni, and having a mixed structure comprising a phase of intermetallic compound of the rare earth element and the transition metal and a fine mixed phase of the rare earth element and intermetallic compound of the rare earth element and the transition metal or having a mixed structure comprising the structure above and a phase of the rare earth element alone. The target has uniform composition and high strength free from cracking, etc., shows less composition difference between film and target and less change of the film composition with elapse of sputtering time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.