Method of cleaning using hydrochlorofluorocarbons
US4947881A · kind A · utility
38Cited by
5References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 24, 1989 |
| Grant date | Aug 14, 1990 |
| Priority date | — |
| Expiry date | Feb 24, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23G5/02825
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A method of cleaning a surface of a substrate is provided. The method comprises treating the surface with a solvent comprising a compound of the formula EQU CH.sub.a Cl.sub.b F.sub.c (CF.sub.2).sub.d CH.sub.e Cl.sub.f F.sub.g wherein a+e ranges from 1 to 4, b+f equals 2, c+g ranges from 0 to 3, d is from 1 to 4, a+b+c=3, and e+f+g-3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.