Preionization means for a gas-discharge laser
US4951295A · kind A · utility
1Cited by
1References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 19, 1989 |
| Grant date | Aug 21, 1990 |
| Priority date | — |
| Expiry date | May 19, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/09713
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A preionization means for a gas-discharge laser, such as an excimer laser, comprises a stirrup member 26 and a preionization strip 20 secured thereto. To obtain the longest possible life of the laser with economical material use the preionization strip 20 is made from a different material from the stirrup member 26.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.