Ion detection apparatus
US4952802A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 29, 1988 |
| Grant date | Aug 28, 1990 |
| Priority date | — |
| Expiry date | Jul 29, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Ion detection apparatus has an ionizer provided with an ionizer volume for receiving a specimen to be analyzed. An electron gun is operatively associated with the ionizer for bombarding the specimen with an electron beam and converting the specimen into ions. An analyzer receives the ions from the ionizer volume and includes a detector for detecting the ions. The electron gun has focusing means for varying the size and intensity of the electron beam. The electron gun may have an accelerating anode, a focusing collimator and a second anode. The ionizer means may have an extractor lens and collimating lens as well as a groundplate. The ionizer means may have an electron collecting plate for receiving electrons which pass through the ionizer volume and providing feedback regarding the electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.