Scanning scattering microscope with hemispherical mirror and microfocused beam
US4954722A · kind A · utility
9Cited by
6References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 21, 1989 |
| Grant date | Sep 4, 1990 |
| Priority date | — |
| Expiry date | Jul 21, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus (10) for producing two-dimensional micrographs of overall surface microtopography of a given specimen (19) by using a photodetector (22) to measure the off-specularly reflected light from a focussed light beam (50) which is projected through a hemispherical mirror (20) onto the specimen surface as the specimen surface is scanned by the focused beam of light (50). Scanning can be accomplished either by moving the specimen surface (19) as a result of moving the sample holding member (18) or by moving the focused beam of light by means of a light beam deflection device (25).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.