Radio frequency hollow cathode
US4954751A · kind A · utility
6Cited by
10References
12Claims
0Family size
Inventors
Key dates
| Filing date | Oct 27, 1988 |
| Grant date | Sep 4, 1990 |
| Priority date | — |
| Expiry date | Oct 27, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/16
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cathode has a pair of cavities in which are disposed respective electrically isolated electrodes. An inert gas is introduced individually into the cavities. Individually outletting from those cavities are a pair of respective apertures. Radio frequency energy is applied to the electrodes to establish a plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.