Spatial light modulator
US4954789A · kind A · utility
613Cited by
11References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 28, 1989 |
| Grant date | Sep 4, 1990 |
| Priority date | — |
| Expiry date | Sep 28, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electrostatically deflectable plate spatial light modulator with light reflecting plates (106) composed of aluminum alloy and with symmetrically located supporting hinges (108) connecting the plates (106) to support posts (104); this provides a thick stiff plate and a thin compliant hinges with deflection perpendicular to the plane of the plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.