Elimination of turbulence for silicon micromachined airflow sensor
US4955230A · kind A · utility
3Cited by
1References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 7, 1989 |
| Grant date | Sep 11, 1990 |
| Priority date | — |
| Expiry date | Aug 7, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6842
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The sensor comprises a silicon sensing element on a ceramic substrate. A slot is provided in the substrate just ahead of the leading edge of the silicon so that some of the airflow that is flowing toward the leading edge surface of the silicon passes through the slot. This promotes a less turbulent flow over the sensing face of the silicon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.