Spatial light modulator
US4956619A · kind A · utility
606Cited by
16References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 28, 1988 |
| Grant date | Sep 11, 1990 |
| Priority date | — |
| Expiry date | Oct 28, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A deflectable beam spatial light modulator formed from a structure of a reflecting layer, typically metal, on a spacer layer, typically photoresist, which in turn is on a substrate containing electronic addressing circuitry is disclosed. Also, the method of fabrication including a plasma etch after dicing of the substrate into chips is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.