Polishing apparatus
US4956944A · kind A · utility
67Cited by
12References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 29, 1989 |
| Grant date | Sep 18, 1990 |
| Priority date | — |
| Expiry date | Aug 29, 2009 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B13/06
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A polishing apparatus for polishing a surface of a work piece requiring high surface precision such as an optical component or a metal mold by applying a tool, in which the tool is given a rocking motion of the surface of work to be polished while the work is given a rotary motion. Besides the rotary motion of the work, the rotation and rocking motion of the tool and the movement of the tool on the surface to be polished are detected and are controlled according to the working information for the surface to be polished.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.