Plurality of beam producing means disposed in different longitudinal and lateral directions from each other with respect to a substrate
US4957061A · kind A · utility
36Cited by
16References
58Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 18, 1989 |
| Grant date | Sep 18, 1990 |
| Priority date | — |
| Expiry date | Dec 18, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/562
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A device for blowing fine particles is provided which comprises a plural number of upstream chambers for jetting out fine particles provided against a movable substrate. Each of the upstream chambers may be provided with a gas exciter, and also may be provided with an energy imparter for imparting energy to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.