Laser beam scanner and its fabricating method
US4957336A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 10, 1988 |
| Grant date | Sep 18, 1990 |
| Priority date | — |
| Expiry date | Nov 10, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high precision laser beam scanner is provided which is able to shape a beam generated by a laser, suppress the influence of jitter of a scanning beam due to mode hopping of a semiconductor laser, and reduce aberration of the scanning beam. A beam source generates a semiconductor laser beam, which is diffracted by a rotary hologram, forming a scanning beam on a surface to be scanned. An aberration correcting stationary hologram is disposed between the beam source and the rotary hologram. The stationary hologram is constructed with an object wave and a reference wave, which interfere on a stationary hologram substrate subject so that an aberration of the scanning beam on the surface to be scanned shall be corrected. The object wave is a spherical wave which has an aberration, a wave length shorter than that of the semiconductor laser beam, and an incident angle which is not vertical but is inclined with respect to the stationary hologram substrate. A method for fabricating the laser beam scanner is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.