Detector for scanning electron microscopy apparatus
US4958079A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 21, 1989 |
| Grant date | Sep 18, 1990 |
| Priority date | — |
| Expiry date | Feb 21, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24507
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Scanning electron microscopy apparatus employing a detector to detect emission of electrons resulting from the impingement of electrons of an electron beam on an object being viewed, the apparatus including an electron beam source providing the electron beam, a magnet providing a magnetic field to direct the electron beam to the object, a first microchannel plate having a first hole through it aligned with the electron beam, a first surface directed toward the electron beam source for receiving low energy electrons that have been emitted from the object and directed through the hole by the magnetic field, a second surface on the opposite side of side first microchannel plate for discharge of multiplied electrons, and a first anode facing the second surface, the first anode being positioned to collect electrons discharged from the second surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.