Thin film transistor array and method of manufacturing the same
US4958205A · kind A · utility
28Cited by
5References
5Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 29, 1988 |
| Grant date | Sep 18, 1990 |
| Priority date | — |
| Expiry date | Apr 29, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/949
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A self-aligned TFT array for liquid-crystal display devices and a method of manufacturing the array are disclosed. A protective insulating layer on a semiconductor layer is exactly aligned with a gate electrode. A self-alignment method is used for patterning the protective insulating layer and an impurity-doped semiconductor layer on the semiconductor layer. No lift-off process is necessary.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.