Method of modifying a surface of a body using electromagnetic radiation
US4959245A · kind A · utility
18Cited by
4References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 16, 1988 |
| Grant date | Sep 25, 1990 |
| Priority date | — |
| Expiry date | Sep 16, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/268
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of modifying a surface of a body such as a semiconductor body is described in which a beam of electromagnetic radiation is directed towards the surface so that the electromagnetic radiation is incident on the surface at or near the Brewster angle, the electromagnetic radiation incident on the surface preferably being so polarised that the electric vector of the electromagnetic radiation lies in the plane of incidence of the electromagnetic radiation at the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.