Thin-film releasing apparatus
US4961817A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 13, 1988 |
| Grant date | Oct 9, 1990 |
| Priority date | — |
| Expiry date | Dec 13, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1906
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A thin-film releasing apparatus in which a portion of a thin-film is released from a surface of a substrate on which the thin film is stuck, the remaining portion of the thin film is then released starting from the released portion thereof and the thus released thin film is then removed. The apparatus comprises a first thin film conveyange system for releasing the remaining portion of the thin film from the thin film by nipping the thin film at the intitially released portion thereof and for conveying the thus released thin film upwardly from the surface of the substrate simultaneously, and a second thin-film conveyance system for mounting thereon the thin film conveyed by the first thin film conveyance system and for conveying the mounted thin film in a direction intersecting a conveyance direction of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.