Method for making a grating assisted optical waveguide device
US4963177A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 1989 |
| Grant date | Oct 16, 1990 |
| Priority date | — |
| Expiry date | Jun 15, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/1345
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present disclosure makes a grating assisted optical waveguide device. The method includes cleaning a substrate made of glass by means of cleaning agents; depositing a first layer made of metal onto a surface of the substrate by an evaporation process; forming a first mask by making openings in the first layer to expose first parts of the surface, the first mask being formed by a photolithographic process; immersing the substrate in a first bath of molten salt having a first preselected temperature to make a waveguide by increasing the refractive index of the glass in the first parts by an ion-exchange process; removing the first mask from the surface; immersing the substrate in a second bath of molten salt in order to bury the waveguide; depositing a second layer made of metal on the surface of the substrate by an evaporation process; forming a second mask by making openings in the second layer to expose second parts of the surface, the second mask being formed by a photolithographic process; immersing the substrate in a third bath of molten salt having a third preselected temperature to change the refractive index of the glass in the second parts by an ion-exchange process in …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.