Method of manufacturing liquid crystal display device
US4963503A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 1989 |
| Grant date | Oct 16, 1990 |
| Priority date | — |
| Expiry date | Mar 29, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A liquid crystal display device comprises, a plurality of display electrodes which are selectively energized through on-off control of thin film transistors. In order to reduce the channel length of the thin film transistors to increase operation speed and obtain uniform characteristics each display electrode and an associated transistor source electrode is formed on one of a pair of transparent substrates of the liquid crystal display device, a semiconductor layer is formed between the display electrode and source electrode, a gate insulating film is formed on the semiconductor layer, and a gate electrode is formed on a portion of the gate insulating film between the display electrode and source electrode. Then, ions are implanted into the semiconductor layer with the gate electrode used as a mask, thus rendering portions of the semiconductor layer contiguous to the display electrode and source electrode into ohmic layers. A channel is thus obtained between the ohmic layers with its length determined by the length of the gate electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.