Arrangement for reducing piezoelectric effects in an electrical component
US4963954A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 19, 1989 |
| Grant date | Oct 16, 1990 |
| Priority date | — |
| Expiry date | Apr 19, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N52/80
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An arrangement for reducing piezo-electric effects in piezo-electric effect sensitive electrical components formed in a semiconductor body is disclosed. The piezo-electric effect sensitive component or components are located in a particular zone of the semiconductor body. The semiconductor body is in general mounted on a support. However, the zone of the semiconductor body containing the piezo-electric sensitive component or components is not attached to the support but instead is separated from the support by a space. The presence of the space results in a certain degree of mechanical isolation of the part of the semiconductor body which contains the piezo-electric effect sensitive components, whereby the negative influence of the piezo-electric effect on the long term stability of an instrument utilizing the semiconductor body is reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.