Disk scanning apparatus for batch ion implanters
US4965862A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 1989 |
| Grant date | Oct 23, 1990 |
| Priority date | — |
| Expiry date | Sep 15, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68771
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A mechanical scanning system for a batch ion implanter includes a disk for mounting wafers at sites near its periphery and a disk drive assembly for rotating the disk. The disk and the disk drive assembly are supported in an end station vacuum chamber by a scan arm which extends through a sealed opening in an access door. A scan drive assembly attached to the access door scans the scan arm and the disk in an arc-shaped path. Simultaneous rotation and scanning of the disk cause the ion beam to be distributed over the surfaces of the wafers mounted on the disk. A pivot drive assembly rotates the scan arm and the disk about a pivot axis between an implant position and a load/unload position. A bellows seals the scan arm to the vacuum chamber while tranmitting arc-shaped movement into the vacuum chamber. A bellows guide apparatus guides an intermediate portion of the bellows so as to limit lateral distortion caused by pressure differences applied to the bellows in combination with asymmetrical deflection thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.