Cryopump with multiple refrigerators
US4966016A · kind A · utility
17Cited by
7References
18Claims
0Family size
Inventor
Key dates
| Filing date | Oct 17, 1989 |
| Grant date | Oct 30, 1990 |
| Priority date | — |
| Expiry date | Oct 17, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a cryopump with multiple cooling sufaces, each cooled independently by a closed-cycle refrigerator. Specifically, a primary pumping surface is cooled by a first, two-stage refrigerator independently from the radiation shield, which is cooled by a second, single-stage refrigerator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.