Sputtering target
US4966676A · kind A · utility
35Cited by
4References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 1, 1989 |
| Grant date | Oct 30, 1990 |
| Priority date | — |
| Expiry date | May 1, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/3407
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A sputtering target divided into respective target elements of two or more types arranged as a composite on a substrate, is disclosed. A thin sheet whose constituent material comprises one or more of the constituent materials of the target elements, and whose constituent material includes at least one metal material, is interposed between said substrate and target elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.