Method for the production of oxide superconducting films by laser assisted molecular beam epitaxy

US4966887A · kind A · utility

Assignee

• The Research Foundation of State University of NY · US

Inventor

• James Garvey · San Jose, US

Key dates

• Filing date: Jun 24, 1988
• Grant date: Oct 30, 1990
• Expiry date: Jun 24, 2008

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S505/73

Abstract

The present invention relates to a method of directly forming a thin, oriented layer, or film, of superconducting materials, or compositions suitably mixtures of Perovskite-type superconducting oxides, on a support base, or substrate, by the use of a laser assisted molecular beam epitaxy. The method steps generally comprise forming at least one target comprised of metallic precursors of a superconducting oxide composition and vaporizing at least a portion of the target using a vaporization laser beam to produce a vaporized precursor of an appropriate or desired entrained in a pulsed, rapidly flowing, gaseous atmosphere containing at least one gas reactive with said vaporized precursor composition to form a reacted precursor of a superconducting composition. The reacted precursor composition is then formed into a substantially singular, uniform molecular beam, and deposited on a substrate in the form of a thin layer. The apparatus comprises a vaporization laser capable of producing a pulsed laser beam, a pulsed supersonic nozzle having a target chamber, a pressure chamber and a reaction tube, the reaction tube having an entry end and an exit end, the exit end having a microscopic-si…