Process and apparatus for recovering and reusing resist composition
US4967782A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 1988 |
| Grant date | Nov 6, 1990 |
| Priority date | — |
| Expiry date | Aug 25, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/2506
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a tank for use in recovering and reusing resist compositions, which comprises (a) means for measuring the viscosity of a previously used resist composition introduced into the recovery tank; (b) line means for feeding a solvent into the recovery tank; (c) line means for introducing the previously used resist composition into the recovery tank; (d) line means for discharging the viscosity adjusted resist composition from the recovery tank; and (e) means for opening the solvent feed line means described above in (b) when the viscosity as measured by the viscosity measuring means described above in (a) is higher than a predetermined viscosity, and means for closing the same when the predetermined viscosity is reached.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.