Microfabricated cantilever stylus with integrated conical tip
US4968585A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 20, 1989 |
| Grant date | Nov 6, 1990 |
| Priority date | — |
| Expiry date | Jun 20, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever stylus with an integrally formed conical tip is provided for atomic force microscopy AFM. The method for forming a stylus includes forming a circular masking pattern on the surface of a silicon substrate and anisotropically etching the silicon to form a post under the masking pattern. The post is then isotropically etched to produce a conical silicon tip mold. In one embodiment of the invention the silicon substrate and the conical silicon tip mold are thermally oxidized to form a cantilever stylus having including a cantilever arm with a conical tip fixed to its free end. In another embodiment of the invention the silicon substrate and the conical silicon tip mold are coated with a thin film of a dielectric material to form a cantilever stylus with a conical tip. In this embodiment the backside of the stylus is coated with a conductive material and a strong electric field is applied to the tip to cause electromigration of the conductive material to the point of the tip.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.