Apparatus on the carousel principle for the coating of substrates

US4969790A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Andreas Petz · Ingolstadt, DE
• Dan Costescu · Mühlheim am Main, DE

Key dates

• Filing date: Oct 24, 1988
• Grant date: Nov 13, 1990
• Expiry date: Oct 24, 2008

Classification

• Technology area (CPC G): Physics
• CPC primary: G11B7/26
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Apparatus for the coating of substrates in a vacuum chamber is disclosed wherein a rotatable substrate holder bears a plurality of substrate receivers adapted to transport a like number of substrates (26, 26', etc.) step-wise on a circular path from one of two lock stations (8, 9) through an associated coating station (10, 11) and back to the same respective lock station. Each lock station has one transfer device comprising a rotating substrate plate bearing substrate receivers (85, 85', etc. and 86, 86', respectively). Each plate cooperates with four magazines (18, 18', etc. and 19, 19', etc., respectively). Each magazine is equipped with at least two stacks (25, 25', etc., and 27, 27', etc., respectively) of substrates (26, 26', etc.). A rotating device (28, 28', etc. and 29, 29', etc., respectively) cooperates with each of the magazines (18, 18', etc. and 19, 19', etc., respectively) and transports the substrates (26, 26', etc.) between the magazines (18, 18', etc. and 19, 19', etc., respectively) and the substrate receivers (85, 85', etc. and 86, 86', respectively) of the substrate plates (20a, 21a).