Perfluoropolymer coated pellicles
US4970099A · kind A · utility
10Cited by
7References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 1989 |
| Grant date | Nov 13, 1990 |
| Priority date | — |
| Expiry date | May 19, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31891
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Pellicles having films bearing at least one coating of perfluoropolymers as an anti-reflective surface, the perfluoropolymers being copolymerized units of tetrafluoroethylene and perfluro (alkyl vinyl) ether, and further comprising iodo moieties.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.