Patent · US Expired

Method and apparatus for the thin film deposition of materials with a high power pulsed laser

US4970196A · kind A · utility

72Cited by
8References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 19, 1988
Grant dateNov 13, 1990
Priority date
Expiry dateAug 19, 2008

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S505/732
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

The present invention provides an apparatus and method for laser direct writing of materials onto a receiving substrate using a high power pulsed laser. The invention includes a pulsed laser light source, a receiving substrate, disposed opposite the pulsed laser light source, and an optically transparent source support substrate positioned between the receiving substrate and the pulsed laser light source, wherein a surface of the optically transparent source support substrate facing the receiving substrate has coated thereon a thin film of material to be deposited on the receiving substrate. Laser direct writing using the invention is accomplished by impinging the thin film of material with a pulsed laser light from the pulsed laser light source causing material to be selectively "blown off" the optically transparent source support substrate and deposited onto the surface of the receiving substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.