Method of patterning superconductive oxide films by use of diffusion barrier
US4971948A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 1, 1989 |
| Grant date | Nov 20, 1990 |
| Priority date | — |
| Expiry date | Feb 1, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/73
Abstract
In a method of manufacturing a device comprising a film of an oxide superconducting material which comprises an alkaline earth metal, another metal component, copper and oxygen. A superconductor precursor material comprising copper oxide, alkaline earth metal fluoride and another metal or metal oxide, is provided on a substrate in the form of a film. The film is covered with a diffusion barrier against water in accordance with a pattern which is complementary to a desired pattern of superconducting material. Subsequently, the superconducting material is formed in the uncovered portions of the pattern by means of a treatment at an increased temperature in the presence of water and oxygen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.