Thermal mass flow-meter particularly for gases
US4972708A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 22, 1989 |
| Grant date | Nov 27, 1990 |
| Priority date | — |
| Expiry date | Jun 22, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P5/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal mass flow-meter used in particular for corrosive and hot gases. It includes a flow duct having at least two measuring resistors. At least one of these is arranged in the flow cross-section. At least one heat source is provided in the zone of influence of the measuring resistors; heat source and measuring resistance may be identical. For the purpose of obtaining long-term resistance to corrosion accompanied by great sensitivity as regards response, the measuring resistors consist of a thin-film resistor with a ceramic insulating member, a measuring resistor is connected to a ceramic support member by way of glass solder, and the support member is in turn connected to the flow duct by way of a glass solder element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.